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Technical Reports

The results of research performed at PSRC are regularly distributed to the sponsors using Technical Reports. The technical reports are sent to the sponsors prior to submission for external publication at conferences or in scientific journals. The Technical Reports distribute by PSRC are listed below in chronological order.

Technical Reports sent to sponsors during First Fiscal Year (1991-1992)

NUMBER

TITLE

TR-92-001

Evolution and Status of Smart Power Technology

TR-92-002

Power Semiconductor Devices for the 1990s

TR-92-003

Impact of SiC on Power Devices

TR-92-004

Comparison of 6H-SiC, 3C-SiC, and Si for Power Devices

TR-92-005

Power MOSFET Analysis and Optimization for Cryogenic Operation

TR-92-006

The Accumulation Mode Field Effect Transistor

TR-92-007

Fast Switching Power MOS-Gated EST and BRT Thyristors

TR-92-008

An Extended Trench Gate Power MOSFET Structure

TR-92-009

Cryogenic Operation of Asymmetric n-Channel IGBTs

TR-92-010

Comparison of DI and JI Lateral IGBTs

TR-92-011

The Minority Carrier Injection Controlled Field-Effect Transistor (MICFET) - A New MOS-Gated Power Transistor Structure

TR-92-012

Silicon Carbide High Voltage (400V) Schottky

Technical Reports sent to sponsors during Second Fiscal Year (1992-1993)

NUMBER

                                                               TITLE

TR-92-013

Lateral Junction Isolated Emitter Switched Thyristor

TR-92-014

Mobility Study on RIE Etched Silicon Surfaces Using SF6/O2 Gas Etchants

TR-92-015

Comparison of Ultralow Specific On-Resistance UMOSFET Structures:  The ACCUFET, EXTFET, INVFET, and Conventional UMOSFETs

TR-92-016

Characterization of Thermal Oxides Grown on Trench Structures

TR-92-017

Trench-Gate Base-Resistance-Controlled Thyristors (UMOS-BRTs)

TR-92-018

Dielectrically Isolated Lateral Emitter Switched Thyristor

TR-92-019

Dielectrically Isolated Lateral High Voltage P-i-N Rectifiers for Power ICs

TR-92-020

Comparison of Ti and Pt Silicon carbide Schottky Rectifiers

TR-92-021

Abstracts of Papers Submitted to ISPSD'93

TR-92-022

Analysis and Optimization of Power MOSFETs for Cryogenic Operation

TR-92-023

An Emitter Switched Thyristor with Base Resistance Control

TR-92-024

Reactive Ion Etching of 3C-Monocrystalline Silicon Carbide

TR-93-001

Emitter Ballasting Effects in the Base Resistance Controlled Thyristor

TR-93-002

A Study of ESTs Short-Circuit SOA

TR-93-003

Cryogenic Operation of P-i-N Power Rectifiers

TR-93-004

Comparison of High Voltage Power Rectifier Structures

TR-93-005

Junction and Dielectrically Isolated Lateral ESTs for Power ICs

TR-93-006

Large Area MOS-Gated Power Devices Using Fusible Link Technology

TR-93-007

Edge Terminations for SiC Voltage Schottky Rectifiers

TR-93-008

Very low forward drop JBS Rectifiers Fabricated using Submicron Technology

TR-93-009

Modeling the On-state Characteristics of the Emitter Switched Thyristor

TR-93-010

Cryogenic Operation of Asymmetric n-channel IGBTs

TR-93-011

Modelling the Turn-Off Characteristics of the Base Resistance Controlled Thyristor (BRT)

TR-93-012

Electron Irradiation of Emitter Switched Thyristors

TR-93-013

Temperature Dependence of the Emitter Switched Thyristor Characteristics

Technical Reports sent to sponsors during Third Fiscal Year (1993-1994)

    NUMBER

                                                             TITLE

TR-93-014

Abstracts Submitted to IEDM'93

TR-93-015

Trench MPS Rectifiers

TR-93-016

Cryogenic Operation of P-I-N Power Rectifiers

TR-93-017

Forward Biased Safe Operating Area of Emitter Switched Thyristors

TR-93-018

Low Forward Drop JBS Rectifiers Fabricated Using Submicron Technology

TR-93-019

Low Specific Resistivity Ohmic Contacts to 6H-Silicon Carbide

TR-93-020

The Trench MOS Barrier Schottky (TMBS) Rectifier

TR-93-021

High Temperature Performance of Dielectrically Isolated LDMOSFET, LIGBT and LEST

TR-93-022

3C-Monocrystalline SiC Reactive Ion Etching Using SF6/02

TR-93-023

SiC Power UMOSFET; Design, Analysis, and Technological Feasibility

TR-93-024

Abstracts Submitted to ISPSD'94

TR-93-025

Electrical Properties of Thermal Oxide Grown on N-Type 6H-Silicon Carbide

TR-93-026

Power Semiconductor Devices for Variable Frequency Drives

TR-94-001

High Voltage SiC Schottky Rectifiers

TR-94-002

RESP Termination for High-Voltage 6H-SiC Schottky Rectifiers

TR-94-003

Effect of Surface Inhomogenities on the Electrical Characteristics of SiC Schottky Contacts

TR-94-004

Thermal Oxidation of 6H-Silicon Carbide at Enhanced Growth Rates

TR-94-005

High Temperature Performance of Dielectrically Isolated LDMOSFET:  Characterization, Simulation and Analysis

TR-94-006

A Comparison of High Frequency Cell Designs for High Voltage DMOSFETs

TR-94-007

A New IGBT Structure with a Wider Safe Operating Area (SOA)

TR-94-008

Comparison of RBSOA of ESTs with IGBTs and MCTs

TR-94-009

Cryogenic Operation of Power Bipolar Transistors

TR-94-010

Cryogenic Operation of Asymmetric Field Control Thyristors

TR-94-011

Electrical Properties of Thermal Oxide Grown on P-Type 6H- Silicon Carbide

TR-94-012

A Simple Edge Termination for Silicon Carbide Devices with Nearly Ideal Breakdown Voltage

TR-94-013

Large Area MOS-Gated Power Devices Using High-Current Fusible Links

TR-94-014

Large Area MOS-Gated Power Devices Using Fusible Link Technology

Technical Reports sent to sponsors during Fourth Fiscal Year (1994-1995)

    NUMBER

                                                             TITLE

TR-94-015

The Trench MOS Barrier Schottky (TMBS) Rectifier:  A Schottky Rectifier with High than Parallel Plane Breakdown Voltage

TR-94-016

Yield Loss Mechanisms in MOS-Gated Power Devices

TR-94-017

Design Optimization of Large Area MOS-Gated Power Devices Using Wager Repair Techniques

TR-94-018

Optimization of RESURF Effect in DI Lateral IGBT

TR-94-019

Low Resistivity As-Deposited Ohmic Contacts to 3C-SiC

TR-94-020

A Novel Method for Etching Trenches in Silicon Carbide

TR-94-021

Cryogenic Operation of Power Bipolar Transistors

TR-94-022

Vertical Schottky Barrier Diodes on 3C-SiC Grown on Si

TR-94-023

Abstracts Submitted to ISPSD'95

TR-94-024

Reverse Biased Safe Operating Area of Emitter Switched Thyristors

TR-94-025

The Dual Gate Base Resistance Controlled Thyristor

TR-94-026

High Voltage 4H-SiC Schottky Barrier Diodes

TR-94-027

Cryogenic Operation of Asymmetric Field Controlled Thyristors

TR-95-001

Critical Nature of Exide/Interface Quality for SiC Power Devices

TR-95-002

The Dual Channel EST/BRT:  A New High Voltage MOS Gated Thyristor Structure

TR-95-003

A 60 Volt TMBS Rectifier Structure

TR-95-004

An Ultra-Low on-Resistance Trench MOSFET Structure

TR-95-005

Cryogenic Operation of Static Induction (SIT/SITH) Devices

TR-95-006

Comparison of Linear and Circular Cell Dual Channel Emitter Switched Thyristors

TR-95-007

Integral Diodes In  Lateral DI Power Devices

TR-95-008

The Dual-Gate BRT

TR-95-009

A Planar, Nearly Ideal, SiC Device Edge Termination

TR-95-010

On the Presence of Aluminum in thermally Grown Oxides on 6H-Silicon Carbide

TR-95-011

High Voltage (450V) 6H-SiC Buried Gate FET (BG-FET)

TR-95-012

Argon Implanted SiC Device Edge Termination:  Modelling, Analysis and Experimental Results

TR-95-013

Planar, High Voltage, Ion Implanted 6H-SiC P-N Junction Diodes

TR-95-014

High Quality Oxides on 6H-SiC Silicon Carbide using Rapid Thermal Chemical Vapor Deposition

TR-95-015

Bringing Intelligent Power Control to the Information Age

TR-95-016

Planar, Ion Implanted, High Voltage 6H-SiC Junction Diodes

TR-95-017

Step Drift Doping Profile for High Voltage DI Lateral Power Devices

TR-95-018

The Floating Base Thyristor

TR-95-019

Output Characteristics of the Dual Channel EST

TR-95-020

Trench Gate Process Technology

Technical Reports sent to sponsors during Fifth Fiscal Year (1995-1996)

NUMBER

                                                             TITLE

TR-95-021

Planar Edge Termination for 4H-Silicon Carbide Devices

TR-95-022

Reactive Ion Etching of Trenches in 6H-SiC

TR-95-023

The Floating Base Thyristor

TR-95-024

The SIMEST:  An EST Structure without Parasitic Thyristor Achieved using SIMOX Technology

TR-95-025

The DI Lateral Insulated Gate Field Controlled Thyristor (LIGFT)

TR-95-026

Nitrogen Implanted High Voltage, Planar, 6H-SiC N+P Junction Diodes

TR-95-027

A Planar MOS-Gated AC Switch Structure

TR-95-028

The Dual Gate Emitter Switched Thyristor (DG-EST)

TR-95-029

Cryogenic Operation of Power Junction Field Effect Transistors

TR-95-030

Prospects for Development of SiC Power Devices

TR-95-031

High Quality Oxides on 6H-Silicon Carbide using Rapid Thermal Chemical Vapor Deposition

TR-95-032

High voltage (450V) 6H-SiC Substrate Gate JFET (SG-JFET

TR-95-033

Argon Implanted SiC Device Edge Termination:  Modelling, Analysis and Experimental Results

TR-95-034

Planar, High Voltage, Boron Implanted 6H-SiC P-N Junction Diodes

TR-95-035

The SIMEST:  A New EST Structure without Parasitic Thyristor Achieved using SIMOX Technology

TR-95-036

A Planar MOS-Gated AC Switch

TR-95-037

The SIMEST:  A New MOS-Gated Emitter Switched Thyristor Structure without Parasitic Thyristor Achieved using SIMOX Technology

TR-95-038

Nitrogen Implanted High Voltage, Planar, 6H-SiC N+P Junction Diodes

TR-95-039

The DI Lateral Insulated Gate Field Controlled Thyristor (LIGFT)

TR-95-040

The MOS-Gated Floating Base Thyristor:  A New Dual Gate Thyristor with Improved Forward Biased Safe Operating Area

TR-95-041

The Dual-Gate MCT Structure:  A New MCT Structure with Current Saturation Capability

TR-95-042

The Dual Gate EST:  A New MOS-gated Thyristor Structure

TR-95-043

Elimination of the "Birds Beak" in Trench MOS-gate power semiconductor

TR-95-044

Improved Smart Power Discrete Devices Fabricated using SIMOX Technology

TR-95-045

Trends in Power Semiconductor Devices

TR-95-046

EBIC Investigation of Edge Termination Techniques for SI C Power Devices

TR-95-047

Power Transistors

TR-96-001

The SIMEST: A New EST Structure Without Parasitic Thyristor Achieved Using SIMOX Technology

TR-95-002

Nitrogen Implanted High Voltage, Planar, 6H-SiC N+-P Junction Diodes

TR-96-003

The DI Lateral Insulated Gate Field Controlled Thyristor (LIGFT)

TR-96-004

EBIC Investigation of Edge Termination Techniques for Silicon Carbide Power

TR-96-005

The Dual-Gate MOS Controlled Thyristor with Current Saturation Capability

TR-96-006

The Dual Gate EST:  A New MOS-Gated Thyristor Structure

TR-96-007

Elimination of the "Birds Beak" in Trench MOS-gate power semiconductor devices

TR-96-008

The MOS-Gate Floating Base Thyristor: A New Dual Gate Thyristor with Improved Forward Biased Safe Operating Area

TR-96-009

A high voltage (450V) 6H-SiC lateral MESFET structure

TR-96-010

EBIC Measurements of Diffusion Lengths in Silicon Carbide

TR-96-011

DLTS Studies On Bulk and Interface Traps in 6H & 4H-SiC

TR-96-012

The Depleted Base Transistor (DBT)

TR-96-013

3.5kV Trench Dual-Gate MOS Controlled Thyristor

TR-96-014

The DI Lateral Segmented Collector LIGBT

TR-96-015

Improved Smart Power Discrete Devices Fabricated using SIMOX Technology

TR-96-016

Achieving High Breakdown Voltages in DI Lateral Power Devices using Step Drift Doping Profile

TR-96-017

Analysis of 0n-state carrier distribution in the DI-LIGBT

TR-96-018

Improved BRT Structures Fabricated using SIMOX Technology

TR-96-019

Residual damage effects on gate contacts formed on SiC surfaces etched by using the amorphization technique

TR-96-020

Dielectrically Isolated Lateral Merged PiN Schottky (LMPS) Diodes

TR-96-021

SIMFCT:  A MOS-gated FCT with High Voltage Current Saturation

TR-96-022

Current Saturation Mechanism and FBSOA of the SIMEST

TR-96-023

Comparison of 4kV DC-ESTs and IGBTs

Technical Reports sent to sponsors during Sixth Fiscal Year (1996-1997)

    NUMBER

                                                             TITLE

TR-96-024

Kinetics of Enhanced Thermal Oxidation of Silicon Carbide Using Amorphization By Ion-implantation

TR-96-025

SiC Device Edge Termination using Finite Area Argon Implantation

TR-96-026

The Accumulation Channel driven Bipolar Transistor (ACBT)

TR-96-027

Inversion and Accumulation Mobilities in SiC

TR-96-028

FBSOA of Dielectrically Isolated LDMOSFETs and LIGBTs

TR-96-029

The Accumulation Channel driven Bipolar Transistor (ACBT):  a new MOS-Gated Semiconductor Power Device

TR-96-030

The CRMGT:  A New MOS-Gated Power Switch

TR-96-031

High Voltage Trench Dual-Gate MOS Controlled Thyristor

TR-96-032

Bilateral MOS-Gated Thyristor

TR-96-033

Reverse blocking lateral MOS-gated switches for AC power control applications

TR-96-034

A Silicon Carbide LOCOS Process Using Enhanced Thermal Oxidation by Argon Implantation

TR-96-035

A Unified Analysis of Trench MOS-Bipolar Devices

TR-96-036

P-type 4H and 6H-SiC High Voltage Schottky Barrier Diodes

TR-96-037

FBSOA OF DIELECTRICALLY ISOLATED LDMOSFETs AND LIGBTs

TR-96-038

The Accumulation Channel driven Bipolar Transistor (ACBT):  A new MOS-Gated Semiconductor Power Device

TR-96-039

New Dual Gate-BRT structures with enhanced FBSOA

TR-96-040

A Novel P+ Polysilicon/N-SiC Heterojunction Trench Gate Vertical FET

TR-96-041

High Voltage (4kV) Emitter Switched Thyristors

TR-96-042

Analysis of Gate Dielectrics for SiC Power MOSFETs

TR-96-043

600V Dual Gate MCT Structures

TR-96-044

Measurement of Electron and Hole Impact Ionization Coefficients for SiC

TR-96-045

Correlation of the Static and Dynamic Characteristics of the 4.5V Self-Aligned Trench IGBT

TR-96-046

Comparison of high speed DI-LIGBT structures

TR-96-047

Analysis and suppression of latch-up during IGBT mode of DG-BRT operation

TR-96-048

First Order Analysis of Unipolar and Bipolar SiC Power Devices

TR-96-049

Analysis of a High Voltage Heterojunction Gate SiC Field Effect Transistor

TR-96-050

High Voltage P+ Polysilicon/N 6H SiC Heterojunction Diodes

TR-97-001

Measurement of Electron and Hole Ionization Coefficients for SiC

TR-97-002

High Voltage 4kV Emitter Switched Thyristors

TR-97-003

Analysis of Gate Dielectrics for SiC Power UMOSFETs

TR-97-004

A Novel P+ Polysilicon/N- SiC Heterojunction Trench Gate Vertical FET

TR-97-005

FBSOA of Dielectrically Isolated LDMOSFETs and LIGBTs

TR-97-006

600V Dual Gate MCT Structures

TR-97-007

New Dual Gate BRT Structure with enhanced FBSOA

TR-97-008

Correlation between the Static and Dynamci Characteristics of the 4.5kV Self-Aligned Trench IGBT

TR-97-009

The Accumulation Channel Driven Bipolar Transistor (ACBT)

TR-97-010

The dV/dt Capability of MOS-Gated Thyristors

TR-97-011

Static Induction Transistor: A Personal Viewpoint

TR-97-012

Lateral N-Channel MOSFETs on 4H-SiC

TR-97-013

Inversion Layer Mobility in SiC MOSFETs

TR-97-014

High Voltage Planar 6H-SiC ACCUFET

TR-97-015

A Planar Lateral Channel SiC Vertical High Power JFET

TR-97-016

High Voltage Schottky Barrier Diodes on P-type 4H and 6H-SiC

TR-97-017

Influence of the Trench Corner Design on the Edge Termination of UMOS Power Devices

TR-97-018

The Planar 6H-SiC ACCUFET

TR-97-019

Lateral N-Channel Inversion Mode 4H-SiC MOSFETs

TR-97-020

High Inversion Layer Mobility in 6H-SiC MOSFETs

TR-97-021

Effect of Collector Structure on the FBSOA of the Dielectrically Isolated LIGBT

Technical Reports sent to sponsors during Seventh Fiscal Year (1997-1998)

    NUMBER

                                                             TITLE

TR-97-022

An Experimental Evaluation of the On-state performance of Trench IGBT Designs

TR-97-023

Inversion Layer Mobility in SiC MOSFETs

TR-97-024

High Voltage Planar 6H-SiC ACCUFET

TR-97-025

High Voltage Schottky Barrier Diodes on P-type 4H and 6H-SiC

TR-97-026

Inversion Layer Mobility in SiC MOSFETs

TR-97-027

Cryogenic Operation of Power Schottky Barrier Diodes

TR-97-028

4kV Merged PiN Schottky (MPS) Rectifiers

TR-97-029

Comparison of 6H-SiC and 4H-SiC High Voltage Planar ACCUFETs

TR-97-030

A Low Forward Drop High Voltage Trench MOS Barrier Schottky Rectifier with Linearly Graded Doping Profile

TR-97-031

Impact of VLSI Design Rules on High Voltage (2000V) IGBTs/ESTs

TR-97-032

Influence of Collector Resistance on the performance of Accumulation Channel Driven Bipolar Transistors

TR-97-033

Temperature Dependence of Hole Impact Ionization Coefficients in 4H and 6H SiC

TR-97-034

Analysis of Transitions between Thyristor and IGBT Modes for the Dual Gate BRT

TR-97-035

Role of Defects in producing Negative Temperature dependence of Breakdown Voltage in SiC

TR-97-036

A Planar Lateral Channel SiC Vertical High Power JFET

TR-97-037

Analysis and Optimization of the Planar 6H-SiC ACCUFET

TR-97-038

The Planar Lateral Channel MESFET

TR-98-001

Analytical Model for the Threshold Voltage of Accumulation Channel MOS-Gated Devices

TR-98-002

High Voltage (2kV) Dual-Gate BRT Characteristics

TR-98-003

Phonon Scattering limited Mobility in SiC Inversion Layers

TR-98-004

High Temperature Operation of SiC Planar ACCUFETs

TR-98-005

Impact of VLSI Design Rules on High Voltage (2000V) IGBTs/ESTs

TR-98-006

4kV Merged PiN Schottky (MPS) Rectifiers

TR-98-007

Comparison of 6H-SiC and 4H-SiC High Voltage Planar ACCUFETs

TR-98-008

A Low Forward Drop High Voltage Trench MOS Barrier Schottky Rectifier with Linearly Graded Doping Profile

TR-98-009

Trends in Power Discrete Devices

TR-98-010

1100V Dual-Gate BRT Devices

TR-98-011

The Graded Doped Trench MOS Barrier Schottky Rectifier

TR-98-012

Power Loss Comparison for the IGBT, DG-BRT, and the Dc-EST

TR-98-013

High Voltage, Planar, Field Plate Edge Terminated 4H-SiC PN Junction Diodes

TR-98-014

High Voltage Silicon Carbide Devices

TR-98-015

An improved DC-EST Structure with Diode Diverter

TR-98-016

Influence of Cell Design and Electron Irradiation on the FBSOA of DG-BRT Structures

TR-98-017

Enhancing the Maximum Controllable Current Density of the Accumulation Channel Driven Bipolar Transistor

TR-98-018

Modeling of the dV/dt of the IGBT during Inductive Turn-off

Technical Reports sent to sponsors during Eighth Fiscal Year (1998-1999)

    NUMBER

                                                             TITLE

TR-98-019

MOS Devices for Power Electronic Applications

TR-98-020

High Temperature Operation of SiC Planar ACCUFETs

TR-98-021

Ion Implantation Technology for 6H and 4H Silicon Carbide

TR-98-022

Power Discrete Devices: Future Structures and Materials

TR-98-023

4H SiC Lateral Single Zone RESURF Diodes

TR-98-024

MOS-Bipolar Gate IGBT Operation

TR-98-025

The Graded Doped Power UMOSFET

TR-98-026

A New Wide SOA DC-EST Structure with Diode Diverter

TR-98-027

A Comparative Study of High Voltage (4kV) Power Rectifiers

TR-98-028

High Voltage Ni 4H-SiC Schottky Rectifiers 

TR-98-029

MOS-Bipolar Gate IGBT Operation

TR-98-030

The Recessed Gate IGBT Structure

TR-98-031

A Simple Comprehensive Physics-Based Ramp Recovery Model for High Voltage PiN Rectifiers

TR-98-032

An Experimental Analysis of the Dual-Gate EST

TR-99-001

A New Wide SOA DC-EST Structure with Diode Diverter

TR-99-002

High Voltage Ni 4H-SiC Schottky Rectifiers 

TR-99-003

A Comparative Study of High Voltage (4kV) Power Rectifiers (PiN/MPS/SSD/SPEED)

TR-99-004

The Recessed Gate IGBT Structure

TR-99-005

MOS-Bipolar Gate IGBT Operation

TR-99-006

Theoretical and Experimental Study of the Merged PiN/Schottky (MPS) Rectifier

Technical Reports sent to sponsors during Ninth Fiscal Year (1999-2000)

    NUMBER

                                                             TITLE

TR-99-007

Current Saturation Control in Emitter Switched Thyristors

TR-99-008

Analysis of RESURF Phenomenon in 4H-SiC Lateral Devices

TR-99-009

High Voltage DC-ESTs/IGBTs Designed with Transparent Emitters

TR-99-010

4H SiC Lateral RESURF Devices

TR-99-011

GD-UMOSFET Process Design, Fabrication, and Characterization

TR-00-001

4H SiC Lateral RESURF Devices

TR-00-002

High Voltage Planar ACCUFETs on Silicon Carbide

TR-00-003

The Silicon Planar ACCUFET

TR-00-004

The Planar ACBT

TR-00-005

Analysis of High Voltage 4H-SiC ACCUFET Operation       

TR-00-006

Fabrication of High Voltage 4H-SiC ACCUFETs

TR-00-007

High Voltage 4H-SiC ACCUFET: Experimental Results

TR-00-008

Experimental Results of the Planar ACBT

TR-00-009

The Staggered Gate ACBT

TR-00-010

The Accumulation Channel EST

TR-00-011

Experimental Results of the Silicon Planar ACCUFET

TR-00-012

Lateral 3D RESURF Devices for Power ICs

TR-00-013

RF Analysis of GD-UMOSFET and LD-MOSFET

Technical Reports sent to sponsors during Tenth Fiscal Year (2000-2001)

NUMBER

TITLE

TR-00-014

Thermal Impact of Silicon-28 on Power Devices

TR-00-015

Advances in Power Semiconductor Device Technology

TR-01-01

Fabrication Process fir Recessed Gate Devices

TR-01-02

Characteristics of  Recessed Gate Power MOSFETs

TR-01-03

Characteristics of Recessed Gate IGBTs

TR-01-04

Fabrication Process for 4H-SIC RESURF  Devices

TR-01-05

Characteristics of 4H-SIC RESURF Devices

TR-01-06

Characteristics  of 4H-SIC JBS Rectifiers

TR-01-07

A Novel Device Isolation Technology for 4H-SIC

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